NIT Conferences, Workshops & Lectures
Event Archive - 2002
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Nortel Institute for Telecommunications of the University of Toronto & Edward S. Rogers Sr. Department of Electrical and Computer Engineering Distinguished Lecture Series | ||
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There Are No Fundamental Limits to Optical Lithography Professor Steven R. J. Brueck Center for High Technology Materials University of New Mexico Abstract Progress in optical lithography has paced the enormous progress in integrated circuit technology. The ultimate possible limits of optical lithography are explored. The spatial frequency transmission bandwidth of free-space is 2/l, leading to a dense (equal line/space) pattern at a critical dimension of l/4 (or 50 nm for a l of 200 nm). Immersion provides another factor of ~ 1.5 down to a ½ pitch of 33 nm at l ~ 200 nm. Various strategies will be discussed for extending this capability to arbitrary patterns rather than simple gratings. Nonlinear processes, based on the chemistry of photoresist processing and pattern transfer, can further extend optics beyond the linear systems limits of single exposures. The conclusion is that there is no fundamental limit to the resolution of optical lithography; there are only process latitude and manufacturing (e.g. cost) issues. Nanotechnology is of great current interest. For many applications, large numbers of nanostructures with a well-defined long-range order are required. One such example is the use of nanostructuring for semiconductor materials development. Two examples will be discussed as time allows: nanoheteroepitaxy (NHE) for the growth of highly lattice mismatched systems (e.g. GaN on Si); and selective MBE growth of InAs quantum dots on patterned GaAs substrates. Biography Dr. S.R.J.Brueck received a B.Sc. from Columbia University in 1965 and a M.Sc./Ph.D. from MIT in 1967/1971. In 1971, he joined the Quantum Electronics Group at MIT Lincoln Laboratory. In 1985 he became the director of the Center for High Technology Materials (CHTM) and a professor of Electrical and Computer Engineering and Physics at the University of New Mexico. Dr. Brueck has made extensive experimental and theoretical research contributions in many aspects of optics and laser spectroscopy. Material systems investigated include semiconductors, molecular gases, simple molecular liquids, and plasmas used for semiconductor processing. Under his direction, CHTM has become a well established, internationally recognized center for optoelectronics and microelectronics research. Dr. Brueck has published over 200 research articles. He has edited 7 books, been awarded 21 patents and serves as an editor in many journals. He is a fellow of IEEE and OSA and received the IEEE Third Millennium Award. |
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Nortel Institute for Telecommunications of the University of Toronto
Distinguished Lecture
The Virtues of Being Single: A Molecular View
Professor Wilson Ho
University of California, Irvine
Thursday, April 4, 2002
Abstract
The scanning tunneling microscope (STM) has enabled direct visualization and quantitative determination of the properties of individual atoms and molecules which are difficult, if not impossible, to extract from an average over an ensemble. The characteristics of the individuals are emphasized, and through manipulation their interactions can be controlled. It is now possible not only to see and manipulate individual molecules but also to perform spectroscopy, break and form single bonds, induce motions and structural changes, monitor energy flow, and to measure their electrical conductivity. While the precision and details of these results are fascinating, ultimately they may form the basis for nanotechnology.
BiographyWilson Ho was born in 1953. He received his B.S. and M.S. degrees in chemistry from the California Institute of Technology in 1975, and his Ph.D. in physics from the University of Pennsylvania in 1979. He spent a year at the AT&T Bell Laboratories and was on the faculty at Cornell University prior to joining the faculty at the Irvine campus of the University of California in 2000 as a Donald Bren Professor of Physics & Astronomy and Chemistry.
Development of new instrumentation and experimental procedures to probe atoms and molecules at solid surfaces has been an integral part of Ho’s research. He discovered impact scattering and a new selection rule for the widely used technique of high resolution electron energy loss (vibrational) spectroscopy. Recognizing the importance of time resolved measurements, he developed multichannel detectors for time resolved vibrational spectroscopy and femtosecond lasers for surface photochemistry. The desire to “see” what is happening on the surface led him to construct variable, low temperature scanning tunneling microscopes (STM) in ultrahigh vacuum. A unified understanding of the important process of electron transfer at solid surfaces was realized from studies of resonant electron scattering, femtochemistry, and STM-induced chemistry. He was able to reach the sensitivity limit of vibrational spectroscopy by measuring vibrations of single bonds with the STM. By combining imaging, manipulation, and vibrational spectroscopy and microscopy, he was able to probe many fundamental properties of individual atoms and molecules.
He has received an Alfred P. Sloan Foundation Fellowship, an Alexander von Humboldt Research Award for Senior U.S. Scientists, and the Bonner Chemistry Prize from the University of Bonn. He is a Fellow of the American Physical Society. He is especially honored to communicate his research through the AT&T Lecture and the Meloche Lecture at the University of Wisconsin, the William Draper Harkins Lecture at the University of Chicago, the Ångstrom Lecture at the University of Uppsala, the Distinguished Lectures at Ford Research Laboratory and the Academia Sinica in Taiwan, the Bren Lecture at UC Irvine, and plenary lectures at STM’99 in Korea and ECOSS-19 in Spain.
2001
2000
